JPH0314048Y2 - - Google Patents
Info
- Publication number
- JPH0314048Y2 JPH0314048Y2 JP15657887U JP15657887U JPH0314048Y2 JP H0314048 Y2 JPH0314048 Y2 JP H0314048Y2 JP 15657887 U JP15657887 U JP 15657887U JP 15657887 U JP15657887 U JP 15657887U JP H0314048 Y2 JPH0314048 Y2 JP H0314048Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- shaft
- holding frame
- portions
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 71
- 239000000126 substance Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 16
- 238000003780 insertion Methods 0.000 claims description 12
- 230000037431 insertion Effects 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000007654 immersion Methods 0.000 description 7
- 238000001035 drying Methods 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- MIZLGWKEZAPEFJ-UHFFFAOYSA-N 1,1,2-trifluoroethene Chemical group FC=C(F)F MIZLGWKEZAPEFJ-UHFFFAOYSA-N 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15657887U JPH0314048Y2 (en]) | 1987-10-12 | 1987-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15657887U JPH0314048Y2 (en]) | 1987-10-12 | 1987-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160541U JPH0160541U (en]) | 1989-04-17 |
| JPH0314048Y2 true JPH0314048Y2 (en]) | 1991-03-28 |
Family
ID=31435244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15657887U Expired JPH0314048Y2 (en]) | 1987-10-12 | 1987-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0314048Y2 (en]) |
-
1987
- 1987-10-12 JP JP15657887U patent/JPH0314048Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0160541U (en]) | 1989-04-17 |
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